Mitsubishi Heavy Industries Technical Review
    Vol. 57 No. 3 (2020)   Machine Tools
    Technical Papers

    Development of Advanced Machining Technology Using ABLASER® Laser Micromachining System
    - Targeting Laser Solutions in the Fields of Mobility and Electronics -

    Nakagawa Kiyotaka,
    Akama Satoru

    In recent years, laser machining has been applied to products in various fields including the semiconductor industry. However, it is difficult for conventional laser machining techniques to meet the need for high-precision, high-quality micromachining that accompanies the miniaturization and performance improvement of parts because of the thermal effects on the workpiece material. Therefore Mitsubishi Heavy Industries Machine Tool Co., Ltd. has adopted a short pulse laser, combined it with our proprietary technologies including the laser head and the control mechanism to develop the ABLASER® laser micromachining system and realized high-precision and high-quality micromachining stably during long periods of time. We have also clarified that not only metallic materials, but also brittle materials such as ceramics and glass can be micromachined by laser.