Mitsubishi Heavy Industries Technical Review
    Vol. 53 No. 4 (2016)   New Products & Technologies
    Technical Papers

    Development of Microfabrication Technology using DUV Laser

    Yuji Imamiya,
    Satoru Akama,
    Yoshihito Fujita,
    Haruhiko Niitani

    Laser machining technology has advanced significantly in recent years and has been applied in various different fields for industrial use due to its convenience and the great variety of applicable materials. In laser micromachining represented by drilling, high-quality and high-precision machining is possible by utilizing a short-pulse laser. However, a higher level of precision is desired. Mitsubishi Heavy Industries Machine Tool Co., Ltd. has developed an optical system utilizing a Deep Ultraviolet (DUV) laser in which further improvement is expected in the machining resolution, and has successfully identified the machining characteristics of individual materials. Furthermore, a drilling test was conducted with a laser micromachining unit equipped with a newly-developed optical system, which, as a result, achieved ultrafine drilling to make a hole of a minimum of 10μm in diameter and an aspect ratio of 10.