Radical molecule concentration measurement in diesel engine by Laser Induced Fluorescence (LIF) system
Real-time measurement of pulverized coal compositions by Laser Induced Breakdown Spectroscopy (LIBS) system
3-dimensional shape measurement of turbine blade by laser radar method
Measurement systems for optical properties of thin films
Plasma CVD reactor with rotating magnetic field
Multi-reactor plasma CVD system for stacked layer devices
Solar Power Systems

Our research center is creating advanced measurement techniques and developing new products using laser, plasma, and etc. Especially, LIF (Laser Induced Fluorescence) system and LIBS (Laser Induced Breakdown Spectroscopy) system have attracted attention as plant-monitoring/controlling techniques, those can be real-time measurements of coal property by laser. And then, original plasma CVD reactor with rotating magnetic field can manufacture high-quality/large-area thin film product, and its research is applied to any industrial fields such as semiconductor industry.

 
Radical molecule concentration measurement in diesel engine by Laser Induced Fluorescence (LIF) system
Real-time measurement of pulverized coal compositions by Laser Induced Breakdown Spectroscopy (LIBS) system
3-dimensional shape measurement of turbine blade by laser radar method
Measurement systems for optical properties of thin films
Plasma CVD reactor with rotating magnetic field
Multi-reactor plasma CVD system for stacked layer devices
Solar Power Systems