• Radical molecule concentration measurement in diesel engine by Laser Induced Fluorescence (LIF) system
• Real-time measurement of pulverized coal compositions by Laser Induced Breakdown Spectroscopy (LIBS) system
• 3-dimensional shape measurement of turbine blade by laser radar method
• Measurement systems for optical properties of thin films
• Plasma CVD reactor with rotating magnetic field
• Multi-reactor plasma CVD system for stacked layer devices
• Solar Power Systems

The plasma CVD reactor is used for development of environment-friendly amorphous and silicon type solar cells.