| December 4, 2006 Mitsubishi Heavy Industries, Ltd. Technology Alliance Investment, Ltd. |
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| Joint Commercialization of "MCR-CVD Technology," A Key Technology in Semiconductor Manufacture - MHI's First Carve-out - |
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| Tokyo, December 4, 2006 - Mitsubishi Heavy Industries, Ltd. (MHI) and Technology Alliance Investment, Ltd. (TAI)*1 will jointly commercialize "MCR-CVD (Metal Chloride Reduction Chemical Vapor Deposition)," an innovative film deposition technology for forming metal film deposition applying high-density plasma solely using chlorine gas. High expectations are held of the technology, which was developed by MHI and is the first method of its kind in the world, as the next generation in semiconductor manufacturing technology. | |||||||||||||||
By concentrating MHI's intellectual properties and development resources relating to the technology into a company established by TAI for the specific purpose of promoting MCR-CVD business, the two companies aim to expeditiously develop business from the technology. This will be MHI's first "carve-out*2," a business model to effectively commercialize promising technological resources developed by one company involved in various businesses, by strategically carving them out to accelerate their growth while introducing external management resources. PhyzChemix Corporation (PCX), a wholly owned subsidiary established by TAI in Tokyo last year, will commercialize the MCR-CVD technology. Until now PCX has been working toward commercialization of MCR-CVD technology under intellectual properties licensed from MHI, but now the company will aim for more effective and faster commercialization by further concentrating business resources related to the technology into the company. To operate PCX, TAI will not only provide human resources and funds but also handle work consignment and coordination of tie-ups. MHI will concentrate its human resources, intellectual properties and facilities related to MCR-CVD technology into PCX. MHI also will continue to cooperate in PCX's research and development activities with respect to human resources and testing and evaluation facilities, leveraging its strength as a company comprehensively conducting all aspects of manufacturing activities. PCX, capitalized at 310 million yen, markets MCR-CVD technology-applied systems related to semiconductor manufacturing, including wiring and metal gate forming systems for LSIs as well as feed-through*3 wiring for MEMS (micro-electro-mechanical systems) and multilayer LSI chips. With MCR-CVD, wires and transistor electrodes are formed on LSI wafers utilizing chemical reduction action by chloride plasma. Since the technology employs only chlorine gas and solid metal and does not require special gases or metal complexes of the kind conventionally needed, MCR-CVD is a simpler system enabling dramatically simplified operation and maintenance. As the technology is also superior in embedding, it is expected to largely eliminate complicated pre- and post-processes that affect LSI production costs. MHI developed the MCR-CVD technology in late 2002. The company then launched development of a commercial-use system while simultaneously applying for domestic and international patents for 46 basic technologies. It ultimately opted for a technology/business carve-out, however, because of the latter arrangement's advantages in terms of human resources for commercialization and strong links with both customers and vendors - factors requisite to keep pace with market demand. Going forward, PCX will manage the business and operations, gathering and fully utilizing the resources (human resources, technology and business network) unique to this field. TAI will fully support PCX and enhance its business value, and MHI will promote synergy effects with its semiconductor manufacturing equipment business. Notes:
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About Mitsubishi Heavy Industries Mitsubishi Heavy Industries, Ltd. (MHI), headquartered in Tokyo, Japan, is one of the world's leading heavy machinery manufacturers, with consolidated sales of 2,792 billion yen in fiscal 2005 (year ended March 31, 2006). MHI's diverse lineup of products and services encompasses shipbuilding, power plants, chemical plants, environmental equipment, steel structures, industrial and general machinery, aircraft, space rocketry and air-conditioning systems. For more information, please visit the MHI website (http://www.mhi.co.jp). PRESS CONTACT: Mitsubishi Heavy Industries, Ltd. Technology Alliance Investment, Ltd. |
